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Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC CIK#: 0001113232 (see all company filings)

SIC: 3559 - SPECIAL INDUSTRY MACHINERY, NEC
State location: MA | State of Inc.: DE | Fiscal Year End: 1231
(CF Office: 06 Technology)
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Items 1 - 40  0001113232 Filings RSS Feed
Filings Format Description Filing Date File/Film Number
PRE 14A  Documents   Interactive Data Other preliminary proxy statements
Acc-no: 0001104659-24-032133 (34 Act)  Size: 4 MB
2024-03-08 000-30941
24732481
8-K  Documents   Interactive Data Current report, items 5.02, 8.01, and 9.01
Acc-no: 0001104659-24-029398 (34 Act)  Size: 220 KB
2024-02-29 000-30941
24704258
10-K/A  Documents   Interactive Data [Amend] Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001558370-24-001969 (34 Act)  Size: 11 MB
2024-02-28 000-30941
24694250
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001558370-24-001628 (34 Act)  Size: 12 MB
2024-02-23 000-30941
24672653
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001104659-24-020379 (34 Act)  Size: 13 KB
2024-02-13 005-60443
24627436
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0000902664-24-001374 (34 Act)  Size: 59 KB
2024-02-09 005-60443
24615225
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-24-011628 (34 Act)  Size: 311 KB
2024-02-07 000-30941
24604703
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001086364-24-000386 (34 Act)  Size: 13 KB
2024-01-19 005-60443
24545229
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-23-017452 (34 Act)  Size: 7 MB
2023-11-02 000-30941
231373355
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-23-113387 (34 Act)  Size: 313 KB
2023-11-01 000-30941
231368323
8-K  Documents   Interactive Data Current report, item 5.02
Acc-no: 0001104659-23-098017 (34 Act)  Size: 198 KB
2023-09-05 000-30941
231234203
S-3ASR  Documents Automatic shelf registration statement of securities of well-known seasoned issuers
Acc-no: 0001104659-23-087226 (33 Act)  Size: 770 KB
2023-08-03 333-273639
231139542
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-23-013134 (34 Act)  Size: 7 MB
2023-08-03 000-30941
231139073
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-23-086813 (34 Act)  Size: 315 KB
2023-08-02 000-30941
231135972
SD  Documents Specialized disclosure report
Acc-no: 0001104659-23-062244 (34 Act)  Size: 41 KB
2023-05-18 000-30941
23935978
8-K  Documents   Interactive Data Current report, items 5.02, 5.07, 8.01, and 9.01
Acc-no: 0001104659-23-059495 (34 Act)  Size: 310 KB
2023-05-12 000-30941
23913508
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-23-008317 (34 Act)  Size: 6 MB
2023-05-05 000-30941
23894446
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-23-055521 (34 Act)  Size: 285 KB
2023-05-03 000-30941
23884512
8-K  Documents   Interactive Data Current report, items 8.01 and 9.01
Acc-no: 0001104659-23-046426 (34 Act)  Size: 280 KB
2023-04-18 000-30941
23825500
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001104659-23-043474 (34 Act)  Size: 13 KB
2023-04-10 005-60443
23810571
ARS  Documents Annual Report to Security Holders
Acc-no: 0001104659-23-039637 (34 Act)  Size: 393 KB
2023-03-31 000-30941
23783318
DEF 14A  Documents   Interactive Data Other definitive proxy statements
Acc-no: 0001104659-23-039635 (34 Act)  Size: 7 MB
2023-03-31 000-30941
23783308
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001558370-23-002006 (34 Act)  Size: 12 MB
2023-02-24 000-30941
23665144
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0000902664-23-001472 (34 Act)  Size: 58 KB
2023-02-10 005-60443
23611858
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001104659-23-015404 (34 Act)  Size: 13 KB
2023-02-09 005-60443
23602472
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-23-014531 (34 Act)  Size: 291 KB
2023-02-08 000-30941
23599241
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001306550-23-004023 (34 Act)  Size: 13 KB
2023-01-26 005-60443
23554236
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001306550-23-000591 (34 Act)  Size: 13 KB
2023-01-20 005-60443
23539173
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-22-016292 (34 Act)  Size: 7 MB
2022-11-03 000-30941
221359095
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-22-113976 (34 Act)  Size: 308 KB
2022-11-02 000-30941
221354489
SC 13G  Documents Statement of acquisition of beneficial ownership by individuals
Acc-no: 0000902664-22-004650 (34 Act)  Size: 66 KB
2022-10-27 005-60443
221334169
SC 13G/A  Documents [Amend] Statement of acquisition of beneficial ownership by individuals
Acc-no: 0001085146-22-003277 (34 Act)  Size: 27 KB
2022-10-07 005-60443
221300756
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-22-012118 (34 Act)  Size: 7 MB
2022-08-04 000-30941
221135599
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-22-085626 (34 Act)  Size: 307 KB
2022-08-03 000-30941
221132668
SD  Documents Specialized disclosure report
Acc-no: 0001104659-22-063116 (34 Act)  Size: 41 KB
2022-05-20 000-30941
22945268
8-K  Documents   Interactive Data Current report, items 5.02, 5.03, 5.07, 8.01, and 9.01
Acc-no: 0001104659-22-058781 (34 Act)  Size: 511 KB
2022-05-11 000-30941
22913685
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-22-007307 (34 Act)  Size: 6 MB
2022-05-05 000-30941
22895465
8-K  Documents   Interactive Data Current report, items 2.02 and 9.01
Acc-no: 0001104659-22-055823 (34 Act)  Size: 285 KB
2022-05-04 000-30941
22891590
DEF 14A  Documents Other definitive proxy statements
Acc-no: 0001104659-22-039803 (34 Act)  Size: 3 MB
2022-03-30 000-30941
22783473
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001558370-22-002096 (34 Act)  Size: 11 MB
2022-02-25 000-30941
22677338